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スマートファクトリー
SECS/GEM 製品スイート
スマート接続機器
Supported SEMI Standards:
-
SEMI E4 - RS232
-
SEMI E37 - HSMS
-
SEMI E5 - SECS II Message Specifications
-
SEMI E30 - GEM
Supported SEMI Standards:
-
SEMI E4 - RS232
-
SEMI E37 - HSMS
-
SEMI E5 - SECS-II Message Specification
-
SEMI E30 - GEM
-
SEMI E39 - Object Services
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SEMI E87 - Carrier Management
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SEMI E90 - Substrate Tracking
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SEMI E40 - Process Job Management
-
SEMI E94 - Control Job Management
-
SEMI E116 - Equipment Performance Tracking (future release)
スマート接続機器
Supported SEMI Standards:
-
SEMI E4 - RS232
-
SEMI E37 - HSMS
-
SEMI E5 - SECS II Message Specifications
-
SEMI E30 - GEM
Supported SEMI Standards:
-
SEMI E37 - HSMS
-
SEMI E5 - SECS-II Message Specification
-
SEMI E30 - GEM
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