top of page
![](https://static.wixstatic.com/media/c04e82_40b5e9b284b9433bb39d598906fd3f8d~mv2.jpg/v1/fill/w_125,h_71,al_c,q_80,usm_0.66_1.00_0.01,blur_2,enc_auto/c04e82_40b5e9b284b9433bb39d598906fd3f8d~mv2.jpg)
スマートファクトリー
SECS/GEM 製品スイート
スマート接続機器
Supported SEMI Standards:
-
SEMI E4 - RS232
-
SEMI E37 - HSMS
-
SEMI E5 - SECS II Message Specifications
-
SEMI E30 - GEM
Supported SEMI Standards:
-
SEMI E4 - RS232
-
SEMI E37 - HSMS
-
SEMI E5 - SECS-II Message Specification
-
SEMI E30 - GEM
-
SEMI E39 - Object Services
-
SEMI E87 - Carrier Management
-
SEMI E90 - Substrate Tracking
-
SEMI E40 - Process Job Management
-
SEMI E94 - Control Job Management
-
SEMI E116 - Equipment Performance Tracking (future release)
スマート接続機器
Supported SEMI Standards:
-
SEMI E4 - RS232
-
SEMI E37 - HSMS
-
SEMI E5 - SECS II Message Specifications
-
SEMI E30 - GEM
Supported SEMI Standards:
-
SEMI E37 - HSMS
-
SEMI E5 - SECS-II Message Specification
-
SEMI E30 - GEM
bottom of page