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スマートファクトリー 

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SECS/GEM 製品スイート

スマート接続機器

SecsToHost.Net - SECS/GEM solution for 200mm Equipments

Supported SEMI Standards:

  • SEMI E4 - RS232

  • SEMI E37 - HSMS

  • SEMI E5 - SECS II Message Specifications

  • SEMI E30 - GEM

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STHGEM300 - SECS/GEM solution for 300mm Equipments

Supported SEMI Standards:

  • SEMI E4 - RS232

  • SEMI E37 - HSMS

  • SEMI E5 - SECS-II Message Specification

  • SEMI E30 - GEM

  • SEMI E39 - Object Services

  • SEMI E87 - Carrier Management

  • SEMI E90 - Substrate Tracking

  • SEMI E40 - Process Job Management

  • SEMI E94 - Control Job Management

  • SEMI E116 - Equipment Performance Tracking (future release)

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SecsToPLC.Net - SECS/GEM for PLC

Supported SEMI Standards:

  • SEMI E37 - HSMS

  • SEMI E5 - SECS II Message Specifications

  • SEMI E30 - GEM

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スマート接続機器

SecsToTool.Net - SECS/GEM Framework for Factory Host (EAP)

Supported SEMI Standards:

  • SEMI E4 - RS232

  • SEMI E37 - HSMS

  • SEMI E5 - SECS II Message Specifications

  • SEMI E30 - GEM

Click here to learn more

SecsToDEX.Net - SECS/GEM for Legacy Equipment (Old Machines) 

Supported SEMI Standards:

  • SEMI E37 - HSMS

  • SEMI E5 - SECS-II Message Specification

  • SEMI E30 - GEM

Click here to learn more
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